Internship | Hydrogen permeation study in aluminum and stainless steel alloys for EUV lithography

The next next-generation lithography machines uses EUV light at 13.5 nm to print electronic components on wafers with a nano-meter resolution. Inside these machines EUV light generates hydrogen plasma, which interacts with all the parts of the system: wafers, optics, masks and construction materials. To this day, little is known about the interaction of the EUV-generated plasma with construction materials and consequently its effect on the materials lifetime.

The ultimate goal of this project is to build knowledge on interaction between hydrogen plasma and selected construction materials like aluminium alloys and steel. In order to do so, a detailed model is being developed using COMSOL platform and experimental work is done to validate the model predictions. In this internship the goal will be to measure hydrogen diffusion contestants for aluminium and steel alloys using electrochemical techniques. The results will be used as inputs parameters for the COMSOL model, since there is no information on diffusion constants for the selected construction materials. The work will include a literature study, the integration of various experimental equipment and analysis of the experimental results. This project is performed in collaboration with the TU Delft.

TNO is an independent not-for-profit contract research organization, established by law in 1932, whose activity lies in translating technological knowledge into practical applications. Because of its position and mission, TNO forms a bridge between fundamental research and practical application.

The department of Nano-Instrumentation is part of unit Industry and currently employs approximately 60 people at two locations: Delft and HTC Eindhoven. For over two decades it has provided applied physics solutions for the semiconductor equipment industry and well as for space and nuclear fusion domains. One of the major activities in the past was the development of equipment for the next generation lithography machines like wafer steppers and scanners. Currently our focus is on optics and materials lifetime studies under demanding scanner conditions by performing controlled experiments in our plasma and EUV setups. Another specialisms of our group is contamination control, the prevention of contamination, for instance by particles, when constructing chips or during other processes. Part of contamination control is the design of products, and choosing the right materials. Moreover, we have expertise in vacuum technologies, system engineering, thermal and flow physics as well as in surface analysis using in-house equipment like SEM, XPS, EDX and ellipsometer. We offer a work in diverse, multidisciplinary and inclusive team.

The preferred duration of an internship is 3 months. The exact nature of the assignment will be determined in consultation with the student. We are looking for good students in the hard sciences who are interested in an internship in which they can work on useful applications for industry on the edge of what is scientifically possible.

You want to work on the precursor of your career; a work placement gives you an opportunity to take a good look at your prospective future employer. TNO goes a step further. It’s not just looking that interests us; you and your knowledge are essential to our innovation. That’s why we attach a great deal of value to your personal and professional development. You will, of course, be properly supervised during your work placement and be given the scope for you to get the best out of yourself. Naturally, we provide suitable work placement compensation.

At TNO, we innovate for a healthier, safer and more sustainable life. And for a strong economy. Since 1932, we have been making knowledge and technology available for the common good. We find each other in wonder and ingenuity. We are driven to push boundaries. There is all the space and support for your talent and ambition. You work with people who will challenge you: who inspire you and want to learn from you. Our state-of-the-art facilities are there to realize your vision. What you do at TNO matters: impact makes the difference. Because with every innovation you contribute to tomorrow’s world. Read more about TNO as an employer.

At TNO we encourage an inclusive work environment, where you can be yourself. Whatever your story and whatever unique qualities you bring to the table. It is by combining our unique strengths and perspectives that we are able to develop innovations that make a real difference in society. Want to know more? Read what steps we are taking in the area of diversity and inclusion.

After the first CV selection, the application process will be conducted by the concerning department. TNO will provide a suitable internship agreement. If you have any questions about this vacancy, you can contact the contact person mentioned below.