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Characterizing tip-sample interactions in scanning probe
An experimental method for measuring the nano mechanical, time-varying forces applied on the sample surface during imaging in AFM.
Real-time measurement of tip-sample force
Experimentally tuning and calibrating the tip-sample force
Very good agreement with the theoretical results of tip-sample force
No need for tailored designed cantilevers; no customisation is needed
Calibrating and predetermining the tapping forces
Before imaging the desired sample surface
In diverse semiconductor applications: surface inspection, metrology or nanolithography
Experimental measurement of forces during tapping mode AFM
Calibrating the tapping forces with respect to the excitation frequency and vibration amplitude
Developing a scanning mode based on real-time force feedback
Extracting the mechanical propertis such as stiffness with very high precision
Fully characterising the dynamic behavior of AFM cantilevers
Experimental results of tip-sample interaction force measurement during tapping mode AFM.
Keyvani, M. S. Tamer, M. H. van Es, and H. Sadeghian, ‘Simultaneous AFM nano-patterning and imaging for photomask repair’, in Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 2016, p. 977818.
A. Keyvani, H. Sadeghian, M. S. Tamer, J.F.L. Goosen, F. van Keulen, ‘High Speed Atomic Force Microscopy for Wafer Inspection’, Proceedings of the 11th Nanomechanical Sensing Workshop, NMC (2014), Madrid, Spain.
M. Tamer, H. Sadeghian, Tapping tip-sample interaction force measurement method for tapping AFM during imaging, EP15181449.8.
H. Sadeghian, M. Tamer, A. Keyvani, Method of simultaneous nano-patterning and imaging with AFM, PLT2016018.