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A developed technique at the Early research Programme 3D Nanomanufacturing to see subsurface features and invisibles with nanometre resolution.
Besides the nanometre resolution surface topography, seeing invisibles and features below the surface
Chemical, physical contrast
Subsurface features in nanoelectronics process
Buried defects and void
Imaging inside bio samples, such as single cell
Subsurface image of 100-400 nm metallic structures under 400 nm polymer.
Subsurface imaging Of 100-400 nm metallic structures under multistack layers (metal and polymers)
Subsurface imaging of 100-400 nm metallic structures in 200 nm glass
Tuning the image contrast
Understanding the origin of the image contrast
Sub-100 nm hard structures buried under hard cover, with nanometre resolution
Quantitative analysis of physical properties
Towards below 10 nm subsurface imaging
Left: Surface topography of a multi-layer sample with no signature of subsurface features. / Right: Subsurface nano-imaging of nanofeatures under a 300 nm resist and 100 nm metal layer.
M. Es van, R. Thijssen, A. Mohtashami, D. Piras, P. Neer van, and H. Sadeghian Marnani, ‘Quantitative subsurface nanoimaging of deep buried nanopatterns’, 2016.
D. Piras, J. Vreugd de, and H. Sadeghian Marnani, ‘Contact mechanics modelling of tip-sample interaction in atomic force microscopy of complex layered subsurface media’, Proceedings of 13th Int. Workshop on Nanomechanical Sensing NMC, 2016.
M. van Es, R. Thijssen, H. Sadeghian, Subsurface afm for overlay and alignment, PLT2015093.
R. Thijssen, H. Sadeghian, Automated tuning of parameters for subsurface imaging, PLT2015091.
M. van Es, P. van Neer, H. Sadeghian, Heterodyne force Microscopy (HFM) @ GHz, PLT2015092.
H. Sadeghian, A device for sub-nanometer, substrate independent level sensing, PLT2015035.