Our work

Characterizing tip-sample interactions in scanning probe

An experimental method for measuring the nano mechanical, time-varying forces applied on the sample surface during imaging in AFM.

COMPETITIVE ADVANTAGE

  • Real-time measurement of tip-sample force
  • Experimentally tuning and calibrating the tip-sample force
  • Very good agreement with the theoretical results of tip-sample force
  • No need for tailored designed cantilevers; no customisation is needed

APPLICATION AREAS

  • Calibrating and predetermining the tapping forces
  • Before imaging the desired sample surface
  • In diverse semiconductor applications: surface inspection, metrology or nanolithography

PROVEN SPECIFICATIONS

  • Experimental measurement of forces during tapping mode AFM
  • Calibrating the tapping forces with respect to the excitation frequency and vibration amplitude

TARGET SPECIFICATIONS

  • Developing a scanning mode based on real-time force feedback
  • Extracting the mechanical propertis such as stiffness with very high precision
  • Fully characterising the dynamic behavior of AFM cantilevers
Experimental results of tip-sample interaction force measurement during tapping mode AFM.

PUBLICATIONS

  • Keyvani, M. S. Tamer, M. H. van Es, and H. Sadeghian, ‘Simultaneous AFM nano-patterning and imaging for photomask repair’, in Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 2016, p. 977818.
  • A. Keyvani, H. Sadeghian, M. S. Tamer, J.F.L. Goosen, F. van Keulen, ‘High Speed Atomic Force Microscopy for Wafer Inspection’, Proceedings of the 11th Nanomechanical Sensing Workshop, NMC (2014), Madrid, Spain.

PATENTS

  • M. Tamer, H. Sadeghian, Tapping tip-sample interaction force measurement method for tapping AFM during imaging, EP15181449.8.
  • H. Sadeghian, M. Tamer, A. Keyvani, Method of simultaneous nano-patterning and imaging with AFM, PLT2016018.
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