Our work

Mastering the tip-sample interaction in high speed AFM

The tip-sample interactions in Atomic Force Microscopy it the key feature that strongly affect the performance of AFM, in several application.

Understanding the tip-sample interaction and, consequently, controlling it will result in:

  • a nondestructive measurement for compliant and soft matters;
  • minimising the measurement induced error, towards very high-precision topography measurement;
  • extracting physical quantities, beyond the surface topography, e.g. visco-elasticity, stiffness and chemical properties;
  • increasing decisively the tip-sample interaction force to modify or remoce materials at nano-scale.

COMPETITIVE  ADVANTAGE

  • Controlling the tip-sample interaction force for imaging soft matters such as Directed Self Assembly (DSA);
  • Controlling the tip-sample interaction force to remove and modify matters at nanoscale;
  • A new scanning mode based on direct tip-sample force.

APPLICATION  AREAS

  • 3D metrology at device level in semiconductor industry;
  • Biological imaging and detection, where the lowest possible forces should be applied on the samples while getting higher information;
  • Material science applications, where highest possible amount of information on sample is needed.

PROVEN  SPECIFICATIONS

  • Predicting the interaction forces in transient condition for imaging 3D nanostructures such as FinFET or contact holew;
  • Dynamically compliant cantilevers for low force and high information imaging;
  • Nanomachining in tapping mode AFM;
  • Direct force estimator.

TARGET  SPECIFICATIONS

  • Design of parallel AFMs to increase the throughput of AFM even higher;
  • Dynamically compliant cantilevers for low damage high information imaging;
  • Nanomachining in tapping mode AFM;
  • Direct force estimator.
Imaging 3D nanostructures with high speed AFM may result in damaging transient conditions

 

Publications

INVITED TALK

  • Dynamic Tuning of AFM Micro-Cantilever, EM Symposium October 28, 2015, Hotel Papendal, Aarnhem, The Netherlands.

CONFERENCE PAPERS

  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘Quantifying Amplitude Reduction Mechanism in Tapping Mode Atomic Force Microscopy’, 13thAnnual International Workshop on Nanomechanical Sensing, 22-24 June 2016 Delft, the Netherlands.
  • Aliasghar Keyvani, Mehmet S. Tamer, Maarten van Es, Hamed Sadeghian, ‘Simultaneous AFM Nano-Machining and imaging for Photomask Repair’, Pro SPIE 9778-42, Metrology, Inspection, and Process Control for Microlithography San Jose, California, United States. February 24 2016.
  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘Dynamically Compliant Probes for Atomic Force Microscopy’, 12thAnnual International Workshop on Nanomechanical Sensing, 13-15 Jul 2015 Auckland, New Zealand
  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘Tip- Sample Interactions in Dynamically Compliant AFM Probes’, 12thAnnual International Workshop on Nanomechanical Sensing, 13-15 Jul 2015 Auckland, New Zealand.
  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘Low Force Tapping Mode Imaging of Biological Samples with Tapered Cantilevers’,17th Annual winter workshop on  Advances in Single Molecule research for biology and NanoScience. 30 Jan - 2 Feb 2015, Linz Austria.
  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘Transient Tip-sample Interactions in High-speed AFM Imaging of 3D Nanostructures’, Pro SPIE 9424, Metrology, Inspection, and Process Control for Microlithography, doi:10.1117/12.2185848, San Jose, California, United States. February 22, 2015.
  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘Effect of Excitation Frequency on Tip Wear in Tapping Mode Atomic Force Microscopy’, 16thinternational Scanning Probe Microscopy conference 29 Jun - 2 Jul 2014, Seul, Korea.
  • Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen, ‘High Speed Atomic Force Microscopy for Wafer Inspection’, 11th Annual International Workshop on Nanomechanical Sensing, 30 Apr - 2 May 2014, Madrid, Spain.

PATENTS

Method of operating Atomic Force Microscope with wide band probes. Direct Force Controlled Mode.

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