ATOM - Advanced outgassing setup
- Category:
- Systeem
- Brand:
- Demaco
- Type:
- Reference nr.: TNO TPD
Description
The Advanced Tool for Outgassing Measurements (ATOM) is a custom-built system designed by TNO that operates under ultra-high vacuum (UHV) conditions. It is specifically designed to assess and quantify the outgassing rates of various materials with high precision.
Technical details
ATOM is capable of measuring outgassing rates as low as 1 × 10⁻¹¹ mbar·L·s⁻¹·cm⁻². The system can accommodate samples up to 120 × 180 mm² in size.
Additional techniques
An QMS422 quadruple mass spectrometer, together with an high accuracy Bayard-Alpert vacuum gauge, is used to perform the outgassing measurements.
Applications
ATOM is used to evaluate materials intended for ultra-clean vacuum environments, such as those found in EUV lithography systems and other UHV-based applications, where even minimal outgassing can impact performance or contamination levels.