Devices for detecting and measuring small particles
Modern technologies are used to measure and maintain microscopic surfaces, and keep them free of dirt. We measure defects with scanning probe microscopy and detect the smallest particles with our special scanner, the Rapid Nano.
Detecting small particles
In chip manufacture, it’s important that no particles end up on chips. Even the tiniest particle can make the product unusable. We therefore have a way of detecting 50-nanometre-sized particles using our special scanner, the Rapid Nano. This enables us to assess which working methods are as clean as possible and how they can be improved.
The Rapid Nano
The Rapid Nano is a relatively affordable tool that scans the complete reflective surface (e.g., EUV masks) in a shielded clean box. This is done at a speed of 100 cm2 per hour. The solution can then be integrated into the client’s process.
Rapid Nano Particle Scanner
The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates.
Fast and detailed
According to the latest standards, during the production process, semiconductor devices must not add more than one 50-nanometre particle per 10 cycles to a 15 x 15 cm mask. You can compare this with flying over the Netherlands in a fighter jet, looking for a tennis ball. And you want to have the results within a few hours. This calls for a fast and detailed method.
Know-how at TNO
We’ve been a leader in the field of particle detection for 10 years. We devise methods for reliably detecting and locating defects using our knowledge of optics, signal processing, vacuum technology, and ultra-clean handling.
Looking for an expert?View all experts
PITCCH event: Showcasing Open Innovation
The PITCCH final event will share good practices from PITCCH collaborations, provide a stage for companies to debate open innovation strategies and a explore successful approaches to funding Open Innovation collaborations.
We invite you to join our NextGenHeat symposium, a national symposium to address all heat-related challenges within the process industry.
Quantum internet enabled by space
Building on our combined know-how in quantum, free space optics and classical networks, TNO is working hard to enable quantum internet from space. In this webinar, Charlotte Postma and Gustavo Castro do Amaral will get you up to speed on the achievements so far, and the steps ahead.
Resilient Ship Design Course 2024
Join us from 17-21 June 2024 in Rotterdam for TNO’s course on resilient design of ships against underwater and above water threats. Five days of in depth and valuable theory will be combined with demonstrations and examples of implementation. This eight edition of the course introduces new case studies and workshops, linking theory to actual incidents and ship design.