Devices for detecting and measuring small particles

Thema:
Subsurface scanning probe-microscopy

Modern technologies are used to measure and maintain microscopic surfaces, and keep them free of dirt. We measure defects with scanning probe microscopy and detect the smallest particles with our special scanner, the Rapid Nano.

Detecting small particles

In chip manufacture, it’s important that no particles end up on chips. Even the tiniest particle can make the product unusable. We therefore have a way of detecting 50-nanometre-sized particles using our special scanner, the Rapid Nano. This enables us to assess which working methods are as clean as possible and how they can be improved.

The Rapid Nano

The Rapid Nano is a relatively affordable tool that scans the complete reflective surface (e.g., EUV masks) in a shielded clean box. This is done at a speed of 100 cm2 per hour. The solution can then be integrated into the client’s process.

Rapid Nano Particle Scanner

The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates.

Fast and detailed

According to the latest standards, during the production process, semiconductor devices must not add more than one 50-nanometre particle per 10 cycles to a 15 x 15 cm mask. You can compare this with flying over the Netherlands in a fighter jet, looking for a tennis ball. And you want to have the results within a few hours. This calls for a fast and detailed method.

Know-how at TNO

We’ve been a leader in the field of particle detection for 10 years. We devise methods for reliably detecting and locating defects using our knowledge of optics, signal processing, vacuum technology, and ultra-clean handling.

Get inspired

185 resultaten, getoond 6 t/m 10

TNO joins European collaboration to develop global quantum internet enabled from space

Informatietype:
News
1 September 2023

TNO and the Institute of Communication and Computer Systems (ICCS) and a consortium of other European partners, join forces in the LaiQa-project (Leap in Advancing of critical Quantum key distribution-space components).

TNO investigates underground infrastructure for Einstein Telescope

Informatietype:
News
6 July 2023

TNO researches the underground infrastructure at the possible location for the Einstein Telescope: an advances observatory for measuring gravitational waves.

Earlier detection of hypersonic missiles with TNO technology means more time for interception

Informatietype:
News
16 June 2023

TNO is active in all phases, ranging from novel interceptors and new concepts for Integrated Air and Missile Defense to advanced sensor solutions. Novel sensor technology is necessary as a successful kill-chain will push current radar systems to its limits.

TNO signs Declaration of Amsterdam for inclusive and diverse workplace

Informatietype:
News
15 June 2023

Today TNO signs the Declaration of Amsterdam. This is a declaration of intent by Workplace Pride, the international foundation for LGBTQIA+ inclusion at work. With this, TNO underlines the importance, both moral and practical, of an inclusive workplace and organization. More inclusion also reduces dropout and turnover of innovative talent.

Powerful innovation agenda needed for Dutch high-tech

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News
14 June 2023

The Dutch high-tech sector has enormous growth opportunities but requires a joint strategy between businesses, knowledge institutions, and the government. TNO advocates for a structural funding instrument for R&D and a strong innovation agenda to harness the potential of the sector.