Devices for detecting and measuring small particles
Modern technologies are used to measure and maintain microscopic surfaces, and keep them free of dirt. We measure defects with scanning probe microscopy and detect the smallest particles with our special scanner, the Rapid Nano.
Detecting small particles
In chip manufacture, it’s important that no particles end up on chips. Even the tiniest particle can make the product unusable. We therefore have a way of detecting 50-nanometre-sized particles using our special scanner, the Rapid Nano. This enables us to assess which working methods are as clean as possible and how they can be improved.
The Rapid Nano
The Rapid Nano is a relatively affordable tool that scans the complete reflective surface (e.g., EUV masks) in a shielded clean box. This is done at a speed of 100 cm2 per hour. The solution can then be integrated into the client’s process.
Rapid Nano Particle Scanner
The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates.
Fast and detailed
According to the latest standards, during the production process, semiconductor devices must not add more than one 50-nanometre particle per 10 cycles to a 15 x 15 cm mask. You can compare this with flying over the Netherlands in a fighter jet, looking for a tennis ball. And you want to have the results within a few hours. This calls for a fast and detailed method.
Know-how at TNO
We’ve been a leader in the field of particle detection for 10 years. We devise methods for reliably detecting and locating defects using our knowledge of optics, signal processing, vacuum technology, and ultra-clean handling.
Contact us
-
William van Helden
Functie:Principal BD & Key Account Manager ASML-
Standplaats:Delft - Stieltjesweg
-
Telefoon:+31 88 866 63 59
-
Email:Email William
-
LinkedIn:William on LinkedIn
-
-
Olaf Kievit
Functie:Senior Business Developer-
Standplaats:Delft - Stieltjesweg
-
Telefoon:+31 88 866 86 63
-
Email:Email Olaf
-
-
Sjoerd Oostrom
Function not known-
Standplaats:Delft - Stieltjesweg
-
Telefoon:+31 6 53 84 71 34
-
Email:Email Sjoerd
-
LinkedIn:Sjoerd on LinkedIn
-
Get inspired
TNO and seven chemical multinationals start R&D hub for waste processing
Seven member companies of the Low-Carbon Emitting Technologies (LCET) initiative of the World Economic Forum have signed a collaboration agreement with renowned Dutch innovation organisation TNO to support the LCET Research & Development Hub. Among the participants are BASF, Covestro, Dow, LyondellBasell, Mitsubishi Chemical, SABIC and Solvay.
Satellite instrument OMI orbits Earth for 100,000th time
This week, the Ozone Monitoring Instrument (OMI) reaches a milestone: 100,000 orbits of Earth. This is extra special because the monitoring instrument was originally designed for a six-year mission after its launch in 2004. OMI has since been monitoring atmospheric emissions and the ozone hole for more than 18 years, which has provided a lot of useful data. This enabled TNO, for instance, to measure the effects of stricter air quality policies in European countries.
Jan Nijenhuis appointed Knight in the Order of the Lion of the Netherlands
Jan Nijenhuis Knight has been appointed Knight in the Order of the Lion of the Netherlands. This royal appointment is an acknowledgement of his ground-breaking research in the field of opto-mechatronics. Today, Jan received the decorations that go with this award from Marja van Bijsterveldt, mayor of the city of Delft.
Creative ivy-shaped solar panel system against façade High Tech Campus Eindhoven
Will we soon be able to turn our homes and business premises into one big solar panel? This is getting closer thanks to a special collaboration between TNO, Inbo Architects, Van der Leegte Werkt, Flexipol, and High Tech Campus Eindhoven.
TNO pleads for getting innovations to the road quicker
With the current state of innovation, we can move around much smarter, safer, and cleaner. Implementation is often the limiting factor. This threatens to jeopardize both economic and social goals. TNO advocates more focus on implementing innovations, including testing in a realistic, practical environment.
