Devices for detecting and measuring small particles

Thema:
Subsurface scanning probe-microscopy

Modern technologies are used to measure and maintain microscopic surfaces, and keep them free of dirt. We measure defects with scanning probe microscopy and detect the smallest particles with our special scanner, the Rapid Nano.

Detecting small particles

In chip manufacture, it’s important that no particles end up on chips. Even the tiniest particle can make the product unusable. We therefore have a way of detecting 50-nanometre-sized particles using our special scanner, the Rapid Nano. This enables us to assess which working methods are as clean as possible and how they can be improved.

The Rapid Nano

The Rapid Nano is a relatively affordable tool that scans the complete reflective surface (e.g., EUV masks) in a shielded clean box. This is done at a speed of 100 cm2 per hour. The solution can then be integrated into the client’s process.

Rapid Nano Particle Scanner

The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates.

Fast and detailed

According to the latest standards, during the production process, semiconductor devices must not add more than one 50-nanometre particle per 10 cycles to a 15 x 15 cm mask. You can compare this with flying over the Netherlands in a fighter jet, looking for a tennis ball. And you want to have the results within a few hours. This calls for a fast and detailed method.

Know-how at TNO

We’ve been a leader in the field of particle detection for 10 years. We devise methods for reliably detecting and locating defects using our knowledge of optics, signal processing, vacuum technology, and ultra-clean handling.

Get inspired

146 resultaten, getoond 1 t/m 5

Motivaction performs TNO customer survey

Informatietype:
News
6 February 2023

Research company Motivaction is currently conducting a survey among TNO customers. Motivaction may approach you to participate in this survey.

Angèle Reinders new director Solliance

Informatietype:
News
1 February 2023

Angèle Reinders, professor at Eindhoven University of Technology (TU/e), has been appointed Solliance's new director. Reinders will lead the new broad focus of the Dutch/Flemish/German solar energy partnership.

TNO and TECNALIA collaborate on Digital Twins for Smart & Sustainable Cities

Informatietype:
News
20 January 2023

TNO and TECNALIA Research & Innovation from Spain have announced a new cooperation agreement to establish a strategic partnership in applied research for smart and sustainable cities, mobility and enabling technologies, in particular Local Digital Twins. Representatives of both organisations signed a Memorandum of Understanding to this effect in Bilbao on 11th January 2023.

TNO extends EUV-partnership with USHIO Inc.

Informatietype:
News
20 January 2023

USHIO Inc.-delegation visits TNO and extends EUV-partnership. Over the last five years USHIO Inc. has been TNO's strategic supplier and partner for the high intensity EUV light source used in our EBL2.

Offshore Solar Platform: 3 gigawatt peak (GWp) of solar power by 2030

Informatietype:
News
9 January 2023

The Offshore Solar Platform (POS) was officially launched on 1 January 2023. For now, the platform consists of a core group of Dutch companies whose ambition is the development and roll-out of offshore solar power, together with TNO.