Devices for detecting and measuring small particles

Thema:
Subsurface scanning probe-microscopy

Modern technologies are used to measure and maintain microscopic surfaces, and keep them free of dirt. We measure defects with scanning probe microscopy and detect the smallest particles with our special scanner, the Rapid Nano.

Detecting small particles

In chip manufacture, it’s important that no particles end up on chips. Even the tiniest particle can make the product unusable. We therefore have a way of detecting 50-nanometre-sized particles using our special scanner, the Rapid Nano. This enables us to assess which working methods are as clean as possible and how they can be improved.

The Rapid Nano

The Rapid Nano is a relatively affordable tool that scans the complete reflective surface (e.g., EUV masks) in a shielded clean box. This is done at a speed of 100 cm2 per hour. The solution can then be integrated into the client’s process.

Rapid Nano Particle Scanner

The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates.

Fast and detailed

According to the latest standards, during the production process, semiconductor devices must not add more than one 50-nanometre particle per 10 cycles to a 15 x 15 cm mask. You can compare this with flying over the Netherlands in a fighter jet, looking for a tennis ball. And you want to have the results within a few hours. This calls for a fast and detailed method.

Know-how at TNO

We’ve been a leader in the field of particle detection for 10 years. We devise methods for reliably detecting and locating defects using our knowledge of optics, signal processing, vacuum technology, and ultra-clean handling.

Get inspired

12 resultaten, getoond 1 t/m 5

ESI symposium 2022

Informatietype:
Event

The symposium will feature internationally renowned academic and industrial keynote speakers, a series of presentation tracks, demonstrations, and ample opportunities for discussions and networking.

Startdatum:
Locatie:
Theatre De Schalm, Veldhoven (NL) and online

Webinar: Industry CO2 neutral and circular in 2050

Informatietype:
Event

The necessary sustainability of the industry poses many challenges. Climate targets are being tightened up and have gained momentum in recent years. Decision makers want to know: how do I continue to make a profit in that new context? In this webinar on 28 September we discuss this with partners and come up with tailor-made solutions.

Startdatum:
Locatie:
Online

Appl.AI SPLASH event 2022

Informatietype:
Event

Interested in the possibilities of AI for your business? Take part in the Appl.AI SPLASH Event 2022. High-level keynote speakers will share their experiences.

Startdatum:
Locatie:
Supernova, Jaarbeurs (Utrecht)

Biorizon bio-aromatics networking event

Informatietype:
Event

Come to this networking event for the latest developments in bio-aromatics and to accelerate biobased business together.

Startdatum:
Locatie:
Mol, Belgium

Webinar: Materials Scarcity for Hydrogen Production

Informatietype:
Event

Join VoltaChem's open webinar on the 27th October 2022 on the topic of Materials Scarcity for Hydrogen Production.

Startdatum:
Locatie:
Online