3D measuring machine (CMM)

The ZEISS PRISMO ultra is a high‑accuracy, bridge‑type Coordinate Measuring Machine (CMM) designed for extreme precision metrology. The system is suitable for research, quality assurance, and calibration applications. It features advanced air bearings, high‑resolution Zerodur® scales, and high scanning speeds for demanding industrial and scientific use.

Dimensions:

Measuring volume: 900 × 1300 × 650 mm

Table height: 860 mm

Maximum CMM weight: 2770 kg

Maximum workpiece mass: 1500 kg

Specifications:

Advanced technology equipped with ZEISS VAST Gold active probe head.

Scale resolution: 20 nm, enabled by Zerodur® glass‑ceramic scales.

High mechanical stability due to:

Bridge construction

Air bearings in four directions

Thermal compensation

Active pneumatic damping system

Designed for consistent accuracy under varying environmental conditions.

Supports scanning rates up to 200 points/s depending on probing configuration

Performance data:

Length measurement error (MPEE) in accordance with ISO 10360‑2:2009: E0 = 0.5 + L/500 µm (at 20–22 °C)

Repeatability range (R0) in accordance with ISO 10360‑2:2009: 0.4 µm

Scanning error (THP) in accordance with ISO 10360‑4:2000: 0.9 µm

Maximum permissible probing error, single stylus (PF): 0.5 µm (ISO 10360‑5:2010)

Multi‑stylus probing errors (ISO 10360‑5:2010): PFTH: 1.9 µm

PSTM: 0.6 µm

PLTM: 1.2 µm

Form measurement error (roundness, MZC):

0.5 µm (ISO 12181 / VDI/VDE 2617 part 2.2)

Probing form tolerance (PFTU):

1.0 µm

The CMM is installed in the cleanroom. The laboratory environment is classified as cleanroom class 6/7 and is equipped with an ESD-safe floor. Additional ESD monitoring is available to support safe and reliable high-precision measurement activities.

Powered by the ZEISS VAST Gold active scanning probe, the PRISMO ultra combines ultra-fast, continuous tactile scanning with highly accurate single-point measurements, allowing the optimal measurement strategy to be selected for each specific feature. With support from ZEISS CALYPSO software for measurement planning, execution, and reporting, the system enables a streamlined and repeatable workflow. This provides flexible inspection of complex geometries and speeds up the path from measurement to decision-making.