Zeiss Prismo Ultra CMM

The ZEISS PRISMO ultra is a high‑accuracy, bridge‑type Coordinate Measuring Machine (CMM) designed for extreme precision metrology. The system is suitable for research, quality assurance, and calibration applications. It features advanced air bearings, high‑resolution Zerodur® scales, and high scanning speeds for demanding industrial and scientific use.

Dimensions:

Measuring volume: 900 × 1300 × 650 mm

Table height: 860 mm

Maximum CMM weight: 2770 kg

Maximum workpiece mass: 1500 kg

Specifications:

Advanced technology equipped with ZEISS VAST Gold active probe head.

Scale resolution: 20 nm, enabled by Zerodur® glass‑ceramic scales.

High mechanical stability due to:

Bridge construction

Air bearings in four directions

Thermal compensation

Active pneumatic damping system

Designed for consistent accuracy under varying environmental conditions.

Supports scanning rates up to 200 points/s depending on probing configuration

Performance data:

Length measurement error (MPEE) in accordance with ISO 10360‑2:2009: E0 = 0.5 + L/500 µm (at 20–22 °C)

Repeatability range (R0) in accordance with ISO 10360‑2:2009: 0.4 µm

Scanning error (THP) in accordance with ISO 10360‑4:2000: 0.9 µm

Maximum permissible probing error, single stylus (PF): 0.5 µm (ISO 10360‑5:2010)

Multi‑stylus probing errors (ISO 10360‑5:2010): PFTH: 1.9 µm

PSTM: 0.6 µm

PLTM: 1.2 µm

Form measurement error (roundness, MZC):

0.5 µm (ISO 12181 / VDI/VDE 2617 part 2.2)

Probing form tolerance (PFTU):

1.0 µm

Powered by the ZEISS VAST Gold active scanning probe, the PRISMO ultra combines fast, continuous tactile scanning with highly accurate single-point measurements, allowing the optimal measurement strategy to be selected for each specific feature. Supported by ZEISS CALYPSO software for measurement planning, execution, and reporting, the system enables a streamlined and repeatable workflow. This allows flexible inspection of complex geometries and accelerates the path from measurement to decision-making.

The CMM is installed in room P.00.050 of the Anthony van Leeuwenhoek Laboratory at the TNO site at Stieltjesweg in Delft. The laboratory environment is classified as cleanroom class 6/7 and is equipped with an ESD-safe floor. Additional ESD monitoring is available to support safe and reliable high-precision measurement activities.

Aangedreven door de ZEISS VAST Gold actieve scanningprobe combineert de PRISMO ultra snelle, continue tactiele scanning met zeer nauwkeurige éénpuntsmetingen, waardoor voor elk specifiek kenmerk de optimale meetstrategie kan worden gekozen. Met ondersteuning van ZEISS CALYPSO-software voor meetplanning, uitvoering en rapportage maakt het systeem een gestroomlijnde en herhaalbare workflow mogelijk. Dit biedt flexibele inspectie van complexe geometrieën en versnelt het traject van meting naar besluitvorming.