Nano-instrumentation

We know how to provide applied physics solutions for the semiconductor equipment industry. A major activity is the development of equipment for 'Next Generation Lithography' machines (wafersteppers and scanners). This includes a.o. the design and realization of systems and sensors for the UV and visible wavelength with nanometer mechanical stability and with strong requirements in view of environmental conditions (vacuum, radiation, molecular and particle contamination).

Competences:

  • Optical and mechanical design and analysis
  • AIT (Assembly, Integration and Test)
  • Project management
  • Contamination Control
News

Industry and knowledge institutions join forces in Dutch Optics Centre

19 October 2016
Dutch companies in the optical manufacturing industry can strengthen their position in the global market by joining forces in a consortium with research institutes and the government. Therefore TU Delft... Read more

Technical Sciences

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