Drs. Maarten Lörtzer
- press office
We focus on five social themes.
TNO cooperates with companies, the public sector and other organisations, to apply our knowledge and expertise with and for others.
We develop knowledge not for its own sake, but for practical application.
TNO offers you the chance to do groundbreaking work and help customers and society with innovative, practical and smart solutions.
On our TNOTIME platform you can find blogs, interviews and background stories. Discover the field of TNO captured in photographs, animations, video and text. Share interesting articles and powerful infographics, or download whitepapers.
As EBL2’s name suggests, first there was the EBL(1), built in 2006. To keep improving the development of chips, the equipment to manufacture these chips has to become more advanced. With the introduction of Extreme Ultra Violet lithography, the need for a second generation of EUV test facilities increased. With EBL2, research assignments can be done 100 times faster, reducing turnaround times from months to hours. Another advantage of testing with EBL2 is that the experiments can be done outside the semiconductor factory, which shortens the development time of materials and components. In doing so, costs, risks and time to market are reduced considerably.
TNO designed and built EBL2 with national and international suppliers. Partners ASYS Automatic Systems and USHIO have made a major contribution with their knowledge and skills. Besides the construction, TNO has designed some unique parts of the EBL2 like the collector module, exposure chamber and sample holders. Dr. Dorsel, Board Member at Carl Zeiss, praised TNO at the opening ceremony as a reliable and very pragmatic R&D Partner with a proven long-term track record.
The funding for EBL2 has been provided by the Toekomstfonds (Ministry of Economic Affairs), NanoLabNL, EU framework Programme Horizon 2020 and TNO. The initial investment of about 10 million euros will be recovered over the next 10 years.
TNO’s EBL2 adds to the already flourishing ecosystem of world class opto-mechatronics in the Netherlands with not only ASML as prime example but with many related small and larger businesses and knowledge organisations.
Stay up to date with our latest news, activities and vacancies
We use anonymous cookies to enhance the use of our site.