Nano-instrumentation
We know how to provide applied physics solutions for the semiconductor equipment industry. A major activity is the development of equipment for 'Next Generation Lithography' machines (wafersteppers and scanners). This includes a.o. the design and realization of systems and sensors for the UV and visible wavelength with nanometer mechanical stability and with strong requirements in view of environmental conditions (vacuum, radiation, molecular and particle contamination).
Competences:
- Optical and mechanical design and analysis
- AIT (Assembly, Integration and Test)
- Project management
- Contamination Control
News
Industry and knowledge institutions join forces in Dutch Optics Centre
19 October 2016
Dutch companies in the optical manufacturing industry can strengthen their position in the global market by joining forces in a consortium with research institutes and the government. Therefore TU Delft...
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Expertise groups
- Buildings, Infrastructure & Maritime
- Roadmaps
- Buildings & Infrastructure
- Infrastructure: asset management, safe and sustainable
- Monitoring and Asset Management
- Monitoring civil works
- Rail monitoring
- Road measurement and monitoring
- MEC-Bouwlab (Lab for Materials, Energy and Construction)
- Prob2B(TM) for the reliability of predictions
- Asset management
- Safety and risk assessment
- Damage investigation
- Water safety
- Tunnel safety
- Sustainable infrastructure
- Probabilistic method
- Noise and vibration
- Safe infrastructure at minimal cost
- Infrastructure: roads, rail, locks, bridges and tunnels
- Concrete
- Asphalt and road building
- Repairing and protecting asphalt
- Innovative asphalt mixtures
- Testing and assessing life-cycle performance
- Transition joints and transition structures
- Concrete and concrete structures
- Water safety
- Railways
- Bridges and viaducts
- Impact of traffic on civil works
- Extending service life civil structures
- Steel structures
- Creativity leads to biological asphalt
- Cathodic protection of concrete reinforcement
- Modelling moisture in concrete tunnels
- Locks and water safety
- Tunnels
- Energy Built Environment
- Greenhouse Horticulture: TNO supports suppliers with technical innovations
- CASTA: a computing miracle for greenhouse design
- Systems integration for international greenhouse horticulture
- Data driven integrated growing systems
- TNO can calculate incoming light in greenhouses
- New test protocol for greenhouse light transmittance
- Greenhouse structures
- GreenGrowing: smart energy management
- CO2 capture in greenhouses
- Tomato value chain in Rwanda: minimizing food losses
- Innovative solutions for sustainable cities and neighbourhoods
- Maritime & Offshore
- Expertise groups
- Innovation Centre Buildings
- Building Information Models - BIM
- Results-oriented building
- Results-oriented property maintenance: simple economical
- Shock, vibration and heavy-duty testing
- Natural stone
- Constructive safety of (existing) building structures
- Reliability of existing structures
- Building processes
- Building structures
- Coatings
- Noise and vibration comfort in lightweight buildings
- FIREFISH: Firesafety for Healthcare
- Collaboration on product innovations
- Cold baked brick
- COINS helps building systems to talk to each other
- Comprehensive technical assessment of existing homes
- Falling wall cladding
- Desalination of masonry
- Fungi and algae on building materials
- Modelling and online maps to support health sector real estate planning
- Smart building designs, deliveries and building management with BIM Bots
- Structural Reliability
- Structural Dynamics
- Circular Economy & Environment
- Roadmaps
- Environment & Sustainability
- Health and the city
- Air quality
- TNO's knowhow for healthier and climate-proof air quality
- Nanoparticle and particulate research
- International emission estimation
- Measuring air quality
- Air quality and climate
- National and regional emission monitoring
- Air quality
- NO2 emissions from traffic reduced
- New method for assessing shipping emissions
- TNO contributes to new CAMS operational air quality system
- Noise
- Public safety
- SeReMo
- Industrial safety
- Incident and accident investigation
- Heavy metals and persistent organic pollutants
- EFFECTS Advanced easy to use Consequence Analysis
- The Coloured Books - Yellow, Green, Purple, Red
- RISKCURVES - Software for Quantitative Risk Assessment
- Chemical Safety Investigation
- Health risk assessment
- Integrated area development
- Monitoring community development programmes (India)
- Urbis
- Decisions based on studies of the future
- Interactive instruments
- Innovation in the public sector
- Learning History tool helps province by network approach
- Eurbanlab - Validating sustainable urban innovations
- Subsurface and spatial planning
- Innovation in building and construction
- TNO in the Zuidas project
- Learning History supports innovation projects
- ProVer® elucidates and links cooperation processes
- Eurbanlab and Construction21 join forces to accelerate sustainable urban innovation
- Cities and the climate
- A circular economy the basis for a sustainable society
- Water technology
- Expertise groups
- Defence, Safety & Security
- Roadmaps
- Operations & Human Factors
- Climate Chambers for Research into Human Performance
- Desdemona: the next generation in movement simulation
- LT Lab: the TNO learning technology laboratory
- Performance and health monitoring
- Motion sickness and performance
- The neurobiology of Stress
- Operational military performance in a virtual world
- SUPRA
- Simulation Live Virtual and Constructive
- Concept Development & Experimentation
- IAMD: Integrated Air & Missile Defence
- JROADS
- FACSIM
- Helicopter studies
- Replacement of the F-16
- MARVEL / Comprehensive Approach
- TNO ACE: Advanced CD&E Environment
- Integrated approach to Dutch Royal Navy patrol ships
- Operational analysis during military operations
- SketchaWorld: from sketch to virtual world
- Information & Sensor Systems
- LFAS - Low Frequency Active Sonar
- Tanker Remote Vision System
- Platform signatures
- TNO shapes the future of MMICs and RFICs
- CARPET: Computer-Aided Radar Performance Evaluation Tool
- Underwater Warfare and Security
- Wide Area Motion Imagery WAMI
- SAKAMATA: sonar and marine mammals
- PARANOID: rapid information processing
- Mine analysis and threat evaluation
- Ship acoustics and underwater acoustic signatures
- PERSEUS Wind Turbine Radar Interference Assessment tool
- Electromagnetic security
- National Security
- Social media in the security sector
- Cyber Security Lab
- Automatic Video Compilation and Analysis System (AVACS)
- Critical infrastructure protection
- Concealed weapon detection
- European Cyber Security Perspectives
- FP7 Project IMPACT Europe
- Critical Infrastructure Protection (CIP) policies in Europe
- @MIGO: border control
- Smarter Surveillance, man, machine, synergy
- Cyber Security of Industrial Control Systems
- Protection, Munitions & Weapons
- Firepower
- Protection and survivability of vehicles
- Naval ship protection and survivability
- Protection and survivability of infrastructure
- World-class ballistics research
- Countering IEDs
- Materials for protection concepts
- Energetic Materials
- Ammunition Safety
- Ballistic Performance and Personal Protection
- Chemical, Biological, Radiological and Nuclear (CBRN) Protection
- Expertise groups
- Intelligent Imaging
- Distributed Sensor Systems
- Acoustics and Sonar
- Weapon Systems
- Explosions, Ballistics and Protection
- Chemical, Biological, Radiological and Nuclear (CBRN) Protection
- Energetic Materials
- Human Behaviour and Organisational Innovation
- Networked Organisations
- Training and Performance Innovations
- Perceptual and Cognitive Systems
- Military Operations
- Modelling, Simulation and Gaming
- Energy
- ECN part of TNO
- Cooperation
- Innovation programmes
- Towards ubiquitous SOLAR ENERGY
- Towards large-scale generation of WIND ENERGY
- Towards a societally embedded ENERGY TRANSITION
- Towards an energy-generating BUILT ENVIRONMENT
- Towards CO2-neutral FUELS and FEEDSTOCK
- Towards a CO2-neutral INDUSTRY
- Geological Survey of the Netherlands (GDN)
- Towards a reliable sustainable ENERGY SYSTEM
- ECN part of TNO makes the difference
- What results have TNO and ECN already delivered?
- Ambition
- Roadmaps
- Geological Survey of the Netherlands
- Geological Survey of the Netherlands
- GeoTOP
- Sand, gravel and clay extraction
- GIS and other tools for interactive planning
- DINO, Data and Information of the Dutch Subsurface
- BRO: the Dutch Key Register of the Subsurface
- Sustainable use and management Flemish-Dutch subsurface
- Petroleum Geological Atlas of the Southern Permian Basin
- 3D Subsurface mapping of the Dutch offshore
- Geological Survey of the Netherlands across borders
- Geo Energy
- Efficient attainment of geo energy
- Shallow gas system - interpreting anomalies
- New hydrocarbon prospects in the Chalk
- Permeability prediction in tight gas reservoirs
- Gas Shales in Focus
- Topics in Pulsation, Vibration and Noise Control
- Closed-loop reservoir management
- Production optimisation
- Innovative History Matching
- Biostratigraphy
- Shale gas
- Reliable and safe geo energy
- Subsurface Exploration and Geo-energy
- TNO flow facilities
- Flow-induced pulsations and mechanical vibrations
- Flexibles, risers, flowlines, prevention, pulsations
- PULSIM - Flow and Structural Dynamics
- Trouble shooting wrt vibrations, pulsations, stress,noise
- Design analysis for screw compressors and roots blowers
- PulsimSuite® Pulsation and Vibration Control Software
- Turbo machinery and system dynamics analysis
- Pulsation analysis according to API 618 and API 674
- Anti-fouling and low friction coatings
- Transitioning to sustainable energy
- Sustainable Energy
- New Markets and Users
- Smart Energy System Solutions
- New TNO technology makes drinking water and electricity from seawater
- SolaRoad combines road and solar cells
- HeatMatcher Innovation in control for heating and cooling systems and networks
- PowerMatcher
- Flexiblepower Alliance Network (FAN)
- Flexibility and security essential to future-proof energy system
- TNO founds The Center for Global Prosperity
- X10D
- Flexigas: a smart biogas grid
- e-hub
- Expertise
- Healthy Living
- Roadmaps
- Health Technology & Digital Health
- Biomedical Health
- Work
- Healthy, safe and productive working
- Healthy working with substances
- Safe working
- Sustainable employability vitality
- Future of work
- Ergonomic hand tools in farming (Ghana)
- Cleaner production for textile industry in Bangladesh
- EUWIN, The European Workplace Innovation Network
- Asbestos innovations and research
- Exposure assessment and management of asbestos fibres
- Innovation and detecting asbestos in air, soil and water
- Technological innovations for applications in the asbestos industry
- Innovative and inclusive regional development
- Youth
- Expertise groups
- Industry
- Roadmaps
- Flexible & Free-form Products
- Additive Manufacturing
- Integrating 3D printing and flexible post-processing
- Applied Research for Industrial Automation
- Glass powder printer
- PlanoColor® nanopigments
- High Viscous Material Inkjet Printer
- Line width roughness measurement
- Improved Micro-stereolithography
- Direct Metal Printing
- Rapid Manufacturing Demo Centre
- Continuous 3d printing: faster, cheaper and more flexible
- Large Area Electronics
- Development of new materials
- Van 't Hoff Program
- Next Generation Solar Production Equipment
- Space & Scientific Instrumentation
- Semiconductor Equipment
- Next-Generation Lithography
- Wafer Processing for 3D Chip Manufacturing
- TNO International Centre for Contamination Control (ICCC)
- Industrial Instrumentation
- Optical coatings
- Ultra-precision diamond turning
- Optical polishing technology
- Atmospheric plasma for surface modification
- The world's smallest sensors on fibre and chip
- New records: format, price and precision
- Optical Fiber Sensor System
- Optics Manufacturing
- Optical components – manufacturability and costs
- NANOMEFOS
- MEGaFiT
- Smart Industry
- Sustainable Chemical Industry
- Feedstock flexibility
- Algae for a sustainable future
- Shared Research Centre for Biobased Aromatics
- BIO HArT Biorizon Innovation and Upscaling of Renewable Aromatics Technology
- TNO at Green Chemistry Campus in Bergen op Zoom
- Biomass: chemical building blocks plastics and coatings
- BIO-TIC partnering platform for cooperation in bioeconomy
- BioConSepT
- BioBoost
- CO2 Utilisation for Chemicals and Fuels
- Low cost, full biodegradable sanitary pads for Bangladesh
- Efficient processing
- Electrification of the chemical industry
- Ultrapurification
- Provide!
- Efficient chemical production thanks to TNO Helix®reactor
- R&D approach and services
- Innovative continuous reactors
- Process analysis & control
- From batch to flow tubular reactors
- Model Predictive Control
- Computational Fluid Dynamics
- Intensified separation technology
- Gas separation technology
- HiGee Technology
- Continuous Crystallisation
- Membrane Contactors
- Small-scale Distillation
- Unique catalytic process test plant
- Process Safety Solutions
- Scientifically developed LCA methodologies to improve your carbon footprint of chemicals and sustainability competitive edge
- Improved product functionality
- Expertise groups
- Information & Communication Technology
- Roadmaps
- Information Creation – from data to information
- Investing in privacy pays off
- TrustTester: Secure validation of personal data
- Interoperability and Open Standards
- Innovative techniques for monitoring infrastructures
- Big Data Value Center
- TNO Sport and Media technology
- Shared Value
- From license plate to chip
- ICT and energy
- Smart Appliances
- Intelligent web environment for Comhan Holland
- Multi-touch provides overall picture in complex situation
- Chipping sheep and goats
- KING: Kan Ik Nu Goed
- MIME: MemoryBanks Interactive Metadata Extraction
- Regulation in the media-internet-telecom value web
- Standardisation of semantics
- Vital ICT infrastructures
- TNO makes sure that applied games do their work
- Expertise groups
- Strategic Analysis & Policy
- Traffic & Transport
- Roadmaps
- Mobility
- Safe Mobility
- Safe smartphone usage in the car
- Making bicycles, cars and intersections intelligent
- New airbag protects vulnerable road users
- TRANSUMO Intelligent Vehicles
- WILLWARN
- Traffic deaths among vulnerable road users to zero
- Traffic Infrastructure Sensor Network
- CATS: Cyclist-AEB Testing System development
- Automotive research at TNO
- Reliable Mobility
- Clean Mobility
- Reducing Greenhouse Gas Emissions in Commercial Road Transport
- Measuring the emissions of passenger cars and vans
- Measuring the emissions of trucks and buses
- Emission factors for road traffic
- Measuring the emissions of powered two wheelers
- Emissions of particulate matter from diesel cars
- Sustainable logistics
- Energy Efficient Electric Bus E3Bus
- Random Cycle Generator
- EnViVer: model traffic flow and emissions
- eCoMove
- Automotive Battery Research
- Measuring real-world emissions with TNO’s Smart Emissions Measurement System (SEMS)
- Measuring the emissions of non-road mobile machinery
- Logistics
- Smart Cities
- Expertise groups