Nano-instrumentation

We know how to provide applied physics solutions for the semiconductor equipment industry. A major activity is the development of equipment for 'Next Generation Lithography' machines (wafersteppers and scanners). This includes a.o. the design and realization of systems and sensors for the UV and visible wavelength with nanometer mechanical stability and with strong requirements in view of environmental conditions (vacuum, radiation, molecular and particle contamination).

Competences:

  • Optical and mechanical design and analysis
  • AIT (Assembly, Integration and Test)
  • Project management
  • Contamination Control

Expertise groups

Jan Leendert Joppe MSc

Contact

Jan Leendert Joppe MSc

  • Explosions
  • Ballistics & Protection
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